目前国内供半导体生产用的石英玻璃产品，就其纯度而言，大体分为两个品种，一个是以天然水晶为原料熔制而成的产品，它的杂质总含量

(指Al、Fe、Ca、Mg、Ti、Ni、Cu、Co、Mn、B、K、Na、Li等十三种杂质元素的总和)一般均在50ppm以下， 另一种是用高纯合成原料《如四氯化硅

等》经高温水解熔制而成的产品，它的化学纯度很高，十三个杂质元素的总含量一般均不超过2ppm，但是它的价格昂贵，最大的缺点是软化点较水

晶制品低80℃左右，用它制造的坩埚和扩散管在使用过程中容易变形。为了满足半导体工业对石英玻璃产品质量的需要，并充分利用水晶制产品成

本低软化点高，和合成石英纯度高的特点，我们研制成功了《高纯合成石英涂层石英玻璃产品》，它是在水晶制石英玻璃的内壁用高温喷涂的工艺

方法，涂上一层高纯合成石英玻璃。如此制得的产品同时具有两种石英玻璃产品的优点。

　　Now there are 2 sorts quartz glass products for semiconductors in China according　to purity：molten from nature crystal，impurity contents(Al、Fe、Ca、Mg、Ti、Ni、Cu、Co、Mn、B、K、Na、Li etc)<50ppm，and molten through high temperature hydrolysis from high pure tetrachlosilane，impurity of these metals<2ppm，but this product is very expertsive，besides soft point is 80℃ lower than that of quartz glass made from rock crystal，and the Crucible，diffusion tube made from it become deformed in use．our company using low cost，high soft point of quartz products and high purity of synthetic quartz，has produced the high purity synthetic quartz coating quartz glass products，the technology is putting a layer of high pure synthetic quartz glass into the internal wall Of crystal quartz glass through high temperature spray coating． Thus we have the advantages of both quartz glass products．

化学纯度chemical purity：

半导体用透明石英玻璃坩埚规格尺寸
Size of transparent quartz glass crucibles for semiconductor
(分圆底和平底两种 With round and flat bottoms) mm

涂层重量:

石英坩埚：按厂标准规定，每lOOcm：之坩埚内表面之涂层不得少于1．44克，也可根据用户需要采用多次涂层的方法，将涂层重量增加一倍或更多

石英制品： 包括石英舟及扩散管等，其内表面之涂层重量为≥1克／100厘米 2 。

其他涂层及纯化产品:

纯化产品： 为了避免半导体器件闭管扩散过程中和制造砷化镓单晶等时由于石英器皿内杂质离子扩散所引起的沾污，本公司已建立了在高温下用

氯化氢气体提争乜石英器皿的工艺。经纯化处理的产品，其重金属杂质含量较原产品成倍减少。将这种产品用于硅片闭管扩散时，试验结果表明硅

片‘的少子寿命可以提高一倍以上。

Al 2 0 3 及SiC涂层产品： 为了提高扩散管的使用软化变形温度。 在管的外表面涂上一层高纯Al 2 0 3 并将其烧结，这种涂层产品在1300℃温

度下的变形率较未涂层产品降低60％。若：采用SiC涂层，则可将1300℃下的试验变形率降低80％。这些外表面涂层产品除了可以提高石英管的使

用温度外，还能阻挡外界杂质离子向石英管内壁的渗透，从而保证了硅片电路的质量。

Coating weight：
For quartz glass crucibles：according to plant standard，coating weight inside crucible on every lOOcm 2 no less than 1.44g， if users require more coating， coating Weight may be increased．
For quartz glass wares(including boats and diffusion tubes etc)： coating weight of their inner surface is≥1g／100cm 2 ．

Other coatings and Durified products：
P urlfied products：during diffusion inside tubes of semiconductor products and producing gallium arsenide monocrystal the diffusion of impurity ions inside wares causes pollution．In order to avoid pollotion our company has used the technology of purlfying quartz glass wares With hydrogen chloride under high temperature，as a result， the content of heavy metal impurities greatly decreased in purified products．When this kind of products was used for inside diffusion of silicon plate， the life of ions of current carrier prolonged twice and more．
A L 2 O 3 and SiC coating products：In order to increase temperature of used (softened deformation) temperature for diffuser，coat a layer of high purity AL 2 O 3 on the outer surface Of diffuser and sinter it， the deformation ratio of coated products under 1300℃ will reduce by 60％ in comparing with the no coated products， when coat SiC——by 80％． Besides of incresing used temperature of quartz glass tubes the outer surface coating can also prevent from foreign impurity ions permeating into inner wall of quartz glass tube and guarantee the quality Of silicon plats．